Determination of challenging elements in ultrapure semiconductor grade sulfuric acid by Triple Quadrupole ICP-MS
نویسنده
چکیده
The relatively recent technology of collision/reaction cell (CRC) has become widely used with quadrupole ICP-MS (ICP-QMS) to remove polyatomic ions, which can cause problematic spectral interferences on analytes in complex matrices. By utilizing CRC, background equivalent concentrations (BECs) can be reduced to the ppt or sub-ppt level for almost all elements in semiconductor grade chemicals. In certain sample matrices, however, some polyatomic species which are either very stable, or were originally present at high levels, may not be completely removed by the cell and can therefore still cause residual spectral interferences. For example, a sulfur matrix gives rise to SO+ and SN+ ions in the ICP, both of which can interfere with the determination of titanium. The fi rst ionization potentials (IP) of the polyatomic species SO and SN are 10.2 eV and 8.9 eV respectively and so both are more readily ionized in the ICP than S (IP 10.36 eV). In addition, SO+ has a dissociation energy of 5.44 eV, so it is not easily dissociated Determination of challenging elements in ultrapure semiconductor grade sulfuric acid by Triple Quadrupole ICP-MS
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